Surface growth in laser-focused atomic deposition
نویسندگان
چکیده
We present calculations of surface growth in laser-focused nanostructure fabrication. We show that theoretical predictions of the structure pro le's shape depend sensitively on the model used to describe the growth, and also on the parameters chosen within the model. This sensitivity illustrates that growth e ects can play a major role in laser-focused atomic deposition, and also suggests that this process could be utilized for studies of surface growth mechanisms. Typeset using REVTEX
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